Wafer Alignment Stage

GIGAGER XXY Wafer Alignment Stage XXY350-105-450, also called XXY Alignment Stage or UVW Stage. In order to meet different design needs of users, GIGAGER provide both hollow and solid designs. Due to the compact design with tri-axial, it greatly reduces the overall height, making the stage...
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Product Details

GIGAGER XXY Wafer Alignment Stage XXY350-105-450, also called XXY Alignment Stage or UVW Stage. In order to meet different design needs of users, GIGAGER provide both hollow and solid designs. Due to the compact design with tri-axial, it greatly reduces the overall height, making the stage lighter, thinner and saving space.


1. Specification of XXY Wafer Alignment Stage XXY350-105-450

Work Table

350x350

Accuracy   Level

G:2μm

Base Size

450x450

B:5μm

Height

105

P:10μm

Linear Stroke

±5

N/H: 20μm

Action Angle

±2.3°

Driver Screw

1202

Action Flatness

±0.03

Suggesting Load

Horizontal ≤100KG

Driver

Servo Motor 100W

Surface Processing

Anodizing Sandblasting Treatment


2. What is the XXY Wafer Alignment Stage?

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3. What is the Product Features of GIGAGER XXY Wafer Alignment Stage?

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4. Motion Mode of GIGAGER XXY Wafer Alignment Stage

*A、B、C is Rotary axis,D is Slave axis

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5. How Many Model Are Available?

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6. What Type of Device Could Use the XXY Wafer Alignment Stage?

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Electronic Inspection Device

Multi Axis CNC Equipment



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Laminating Machine

Manipulator



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Laser Processing Device
Polishing Machine


Video Link: https://youtu.be/N5LYWt6WYIU

For more application, please click GIGAGER Youtube Channel: https://www.youtube.com/playlist?list=PLT-2VrhPP3YItwfN_wA4YkS8bzfBpJu39


7. How to Select the Right Model for My Device?

Please contact with our engineer for model selection suggestion.


8. How to Install the XXY Wafer Alignment Stage?

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9. Why choose GIGAGER?


10. FAQ


11. Related Knowledge

The utility model discloses a UVW aligning platform. The UVW aligning platform comprises a base, a rotation shaft arranged on the base, a working table, a bearing arranged between the working table and the base, and a slide way connecting the working table and the rotation shaft. The rotation shaft includes a U rotation shaft, a V rotation shaft, a W rotation shaft and a cooperative rotation shaft. The rotation shaft is composed of a motor, a shaft coupling and a screw rod, and the U rotation shaft, the V rotation shaft and the W rotation shaft are arranged in parallel and in the same plane. The UVW aligning platform has the advantages of simple structure, high aligning speed, high efficiency, strong stability, and strong load capacity, being adaptable to alignment of special requirements.


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