How To Achieve Accurate Alignment of the XXY Alignment Stage and CCD Camera

- Jul 20, 2019-

XXY Alignment Stage, also called UVW alignment stage and XYθ (theta) stages are designed for high precision alignment applications. It moves in an XY-plane and rotate around the center of the XY-plane. The terms alignment table, or XY-rotation stage are often used interchangeably with XYθ, XY-theta stage or UVW stage.


Available in 10 models, in three precision grades from G level 2μm, B level 5μm, P level 10μm respectively, these model have linear travels±5 mm. Additionally, XXY stages can rotate around the center of the XY plane up to ±5 degree to ±2 degree, while the horizontal loading from 10kg to 100kg.


Application of precision alignment technology

Wide range of applications in micro-machinery, ultra-precision machining, nanotechnology and semiconductors


A Precision Alignment Technology

Motor and driver, high-resolution precision alignment stage, CCD camera and image acquisition card, image processing algorithm software and control.

Most Important Pact: High-resolution precision alignment stage.


Next, we will introduce the movement steps of the UVW/XXY alignment stage on the alignment system.

Step 1: The robot holds the upper glass plate above the working stage so that the upper glass plate target is located within the CCD field of view to determine the position of the target.

Step 2: The robot holds the lower glass plate and prevents it from being placed on the working platform so that the target of the lower glass plate is within the CCD field of view to determine the position of the target.

Step 3: According to the relative position difference between the lower glass plate target and the upper glass plate target, the image processing algorithm is used to calculate the movement amount (X, Y, Φ) of the UVW/XXY stage to drive the motor movement to make the lower glass plate and the upper plate. The glass plate is precisely aligned.



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The technical parameters you need for Accuracy, Angle, Suggested load, etc.


Gigager spend a lot of effort on the design of the related positioning stage to create a high-precision alignment stage:

XXY Series Precision Alignment Stage:

XXY5M-01 Precision Alignment Stage:

GX Series Precision X Axis Motorized Stage:

GZ Series Precision Z Axis Motorized Stage

GTZ Series Precision Z Axis Wedge Elevating Stage:

GXY Series Precision XY Axis Motorized Stage:

GXYZ Series Precision XYZ Axis Motorized Stage:

GTXYZ Series Precision XYZ Axis Wedge Motorized Stage: